摘要
采用不同的工艺参数,包括渗氮气压、试样与活性屏之间的距离和施加于试样的负偏压,对AISI316奥氏体不锈钢进行了等离子体源渗氮,以研究渗氮工艺对AISI 316不锈钢等离子体源渗氮行为的影响。结果表明:(1)当试样带悬浮电位、渗氮气压为300 Pa时,随着试样与活性屏的间距从20 mm增加至200 mm,渗氮层厚度由18μm减小至7μm,峰值氮浓度从25%降低至17%(原子分数,下同);(2)当试样与活性屏的间距为100 mm时,渗氮气压从300 Pa升高至500 Pa,渗氮层厚度从16μm减少至7.5μm,峰值氮浓度从21%下降至18%;(3)当渗氮气压为300 Pa、试样与活性屏间距为100 mm时,对试样施加200 V负偏压,氮层厚度和峰值氮浓度分别从未施加负偏压的15μm和20%提高到了18μm和24%。AISI 316不锈钢等离子体源渗氮效果随试样与活性屏之间距离的增大而变差,适当降低渗氮气压或对试样施加适当的负偏压,均有助于提高AISI 316不锈钢渗氮层的厚度和氮浓度。
AISI 316 austenitic stainless steel was plasma source nitrided by using different process parameters such as nitriding pressure, distance of the sample from active screen, and bias applied to the sample, in order to discover the effect of the nitriding practices on plasma source nitriding behavior of the AISI 316 stainless steel. The results showed as follows ：（1） when the sample was charged with a floating potential and the nitriding pressure was as large as 300 Pa, with the increase in distance of the sample from active screen from 20 to 200 mm, the nitrided layer reduced from 18 to 7 μm in thickness, and maximum nitrogen concentration in the nitrided layer reduced from25% by atom（the same below） to 17%;（2） when the distance of the sample from active screen was 100 mm,and the nitriding pressure increased from 300 to 500 Pa, the nitrided layer lessened from 16 to 7. 5 μm in thickness, and the maximum nitrogen concentration in the nitrided layer decreased from 21 to 18. %;（3） when the nitriding pressure was 300 Pa, and the distance of the sample from active screen was 100 mm, the thickness and maximum nitrogen concentration of the nitrided layer increased from 15 μm and 20% under the condition that negative bias was not applied to the sample to 18 μm and 24% under the condition that a negative bias of 200 V was applied to the sample. The result of plasma source nifriding for AISI 316 austenitic stainless steel would become worse with the increase in distance of the sample from active screen. Appropriate decrease in the nitriding pressure and proper application of negative bias to the sample all help to increase thickness and nitrogen concentration of the nitrided layer of AISI 316 stainless steel.
作者
刘金定
王旭
郑凡林
时博
李广宇
LIU Jinding;WANG Xu;ZHENG Fanlin;SHI Bo;LI Guangyu(Department of Mechanical and Power Engineering,Yingkou Institute of Technology,Yingkou 115014,Liaoning China)
出处
《热处理》
CAS
2018年第3期44-48,共5页
Heat Treatment
基金
营口理工学院科研基金项目(QNL201709)
大学生创新创业训练计划项目
关键词
等离子体源渗氮
奥氏体不锈钢
渗氮气压
试样偏压
plasma source nitriding
austenitic stainless steel
nitriding pressure
negative bias
