摘要
多孔感应加热线圈技术能解决区熔法单孔线圈拉制单晶硅效率低、成本高等问题。但因相关理论研究不足,技术不成熟,导致同时拉制的多根单晶硅形状不同。根据电磁场理论建立了多孔线圈磁场模型,分析了工作原理,研究了多孔线圈磁场分布规律。为直观证明同时拉制多根单晶硅的机理,建立了基于Matlab和Ansys的数学模型,在Matlab中计算并绘制磁感应强度分布图,运用Ansys仿真软件对实际过程进行模拟,证明理论分析的正确性和线圈设计的实用性。
A new technology of porous coil disposable drawing a plurality of single crystal silicon rod can solve the problem of low efficiency and high cost of zone melting method of single induction heating coil in drawing monocrystalline silicon. However,the missing of the theoretical research and mature technology leads to different sizes of monocrystalline silicon rods. According to electromagnetic theory,Some characterisitics of the porous coil are studied,including magnetic field model,operating principle,magnetic field distribution.To prove the mechanism of the technology, a mathematical model of the porous coil is constructed based on Matlab and Ansys software. The magnetic flux density distribution is calculated and analyzed by Matlab.Numerical simulation for induction heating process is carried out with Ansys. The simulation results prove the theoretical analysis and the practicality of the designed porous coil.
作者
李金刚
刘高原
Li Jingang;Liu Gaoyuan(College of Automation and Information Engineering, Xi＇an University of Technology, Xi＇an 710048, China)
出处
《系统仿真学报》
CAS
CSCD
北大核心
2018年第6期2182-2189,共8页
Journal of System Simulation
基金
陕西省工业科技攻关项目(2014K06-18)
关键词
单晶硅
多孔线圈
感应加热
数值分析
磁场分布
monocrystalline silicon
porous coil
induction heating
numerical analysis
magnetic distribution
