摘要
真空烘烤设备广泛应用于电子行业元器件的烘烤,除气及去应力等,加热板是真空烘烤设备的核心部件,其表面的温度均匀性是设备性能的重要指标。本文采用有限元软件,在300℃下,分别仿真了不锈钢加热板中加热元件的数量,加热元件的间距以及加热元件的功率对加热板温度场的影响规律,在此基础设计了应用于真空烘烤设备的加热板,试验证明其温度场均匀性满足±5℃的要求。
Vacuum baking equipment is widely used in the baking,degassing and stress removal of electronic components.The heating plate is the core component of the vacuum baking equipment,it＇s surface temperature uniformity is an important indicator of the equipment performance.In this paper,finite element software was used to simulate the effect of the number of heating elements in the stainless steel heating plate,the spacing of the heating elements,and the power of the heating elements of the heating plate at 300° C. On this basis,the vacuum baking was designed. The heating plate of the equipment tests show that the uniformity of its temperature field meets the requirements of ±5 °C.
作者
郭华锋
唐宏波
王成君
王宏杰
GUO Hua-feng;TANG Hong-bo;WANG Cheng-jun;WANG Hong-jie(China Electronics Technology Group Corporation NO.2 Research, Taiyuan 030024,Chin)
出处
《装备制造技术》
2018年第3期150-152,156,共4页
Equipment Manufacturing Technology
关键词
真空烘烤
温度均匀性
热场仿真
vacuum baking
temperature uniformity
thermal field simulation
