摘要
基于两步广义相移干涉术,设计微小形变测量实验装置,介绍工作原理和测量方法。采用同轴相移数字全息正交光路,记录形变前后物光、参光、干涉图强度,以两步广义相移干涉算法为基础,恢复原物光相位和表面形貌信息,相减后得到表面形变量。实验结果表明,相对于现有表面微小形变测量方法,提出得方法能够精密测量物体表面微小形变量,方法简单易行,精度可达纳米量级。
An experimental setup to measure the minor surface deformation is designed based on the technology of two-step generalized phase-shifting interferometry and the corresponding principle and measuring methods are given.The design of in-line phase-shifting digital holography is employed,so that it is convenient to record the surface information from the reflecting object.During the measurement,two-step generalized phase-shifting imterferometry method is used to record the intensity of object wave,reference wave,and interfere frames before and after the deformation.After retrieving the phase of object surface for two cases,the deformation can be achieved by the subtraction one surface from the other one.The experimental results show that the method proposed can accurately measure the small shape variables on the surface of the object and can achieve the precision of nanometer magnitude,and the method is simple and feasible.
作者
毕泽坤
徐先锋
王加栋
刘雨璇
张格涛
张志伟
白芬
张会
BI Zekun;XU Xianfeng;WANG Jiadong;LIU Yuxuan;ZHANG Getao;ZHANG Zhiwei;BAI Fen;ZHANG Hu(College of Science, China University of Petroleum, Qingdao 266580, Chin)
出处
《光学技术》
CAS
CSCD
北大核心
2018年第2期252-256,共5页
Optical Technique
基金
中央高校基本科研业务费专项资金资助项目(15CX05033A)
大学生创新创业项目(20161427,20161442)
关键词
两步广义相移干涉术
物光波前重建
微小形变测量
two-step generalized phase-shifting interferometry
phase-shifting digital holographic
objective- wave reconstruction
measurement of minor deformation
