摘要
针对用户提出的电子工艺设备技术性能指标内容不完整、不清晰、不准确,导致设备不能与工艺技术及使用环境要求完全匹配现象,对电子工艺设备技术性能指标提出方法及内容进行了研究,结合多年的实践经验,从正式提出电子工艺设备技术性能指标前的准备工作、技术性能指标构成要素、各要素的关键点、详细技术性能指标的表现形式等方面,给出了方法和技巧。
Due to the user proposed imperfect,unclear and inaccurate technical performance index of electronic process equipment, the winning equipment can＇t match the requirements of process technology and enviromental needs. The paper researches the proposing methods and contents about equipment＇s technical performance index,with many years of practical experience,and gives some methods and skills for preparations,elements of equipment＇s technical performance index and key points of each element,the embodiment of detailed technical performance index.
作者
彭兴文
卢丹丹
PENG Xingwen;LU Dandan(The 26th Research Institute of CETC, Chongqing 400060, Chin)
出处
《电子工业专用设备》
2018年第2期9-12,33,共5页
Equipment for Electronic Products Manufacturing
关键词
电子工艺设备
技术性能指标
提出方法及内容
Electronic process equipment
Technical performance index
The proposing methods andcontents
