摘要
光栅拼接技术是获得拍瓦激光系统中大口径光栅的一种有效技术途径。通过设计五自由度并联拼接机构,采用滚珠丝杠+压电陶瓷的宏/微双重驱动技术实现毫米工作范围内纳米精度的定位。通过基于有限元法的位移耦合特性分析表明,该机构具有较高的线性度,位移耦合所产生的误差为纳米级,光栅拼接的相对角度偏差小于0.2μrad,位移偏差小于20nm。将两块200mm×400mm的光栅安装在该拼接机构上进行实验研究,获得了清晰的远场焦斑图像,证明该机构可以满足大口径拼接光栅系统的精度要求。
The grating mosaic technique is an effective method to obtain the large-aperture grating of the petawatt laser system. The five degree of freedom parallel mosaic mechanism is designed. The macro/micro dual-drive technique of ball screw and piezoelectric ceramic achieves the location precision of nanometer level in the work range of millimeter level. Based on finite element method, the displacement coupling properties analysis shows that the mechanism has high linearity and the error of displacement coupling is nanometer level. The relative angle deviation of grating mosaic mechanism is less than 0.2 μrad. The displacement deviation is less than 20 nm. Two gratings with size of 200 mm×400 mm are installed in the proposed mosaic mechanism in order to conduct experimental study. The clear image of far-field focal spot is obtained, which proves that the proposed mechanism can meet the accuracy requirement of large-aperture mosaic grating system.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2018年第1期176-181,共6页
Chinese Journal of Lasers
关键词
测量
拼接光栅
柔性并联机构
宏/微双重驱动
有限元法
measurement
mosaic grating
compliant parallel mechanism
macro/micro dual-drive
finite element method
