摘要
简单介绍了不锈钢材料表面的几种加工工艺的优缺点,介绍了化学机械抛光(CMP)工艺的机理。介绍了抛光液的各成分及其作用机理,同时列举了一些常用的药品种类。针对不锈钢材料,通过理论分析或者实验对比,合理选择各个成分的药品种类,确定了二氧化硅、柠檬酸、过氧化氢、烷基酚聚氧乙烯醚和苯并三氮唑作为抛光液的主要成分。通过正交实验的方法确定了每个成分的最佳含量。最后采用优化后的CMP抛光液进行不锈钢的CMP实验,并对比不锈钢抛光前后表面质量验证抛光液的有效性。
The advantages and disadvantages of several methods of surface machining of stainless steel were simply introduced, and the mechanism of the chemical mechanical polishing process was introduced~ The composition and action mechanism of polishing slurrywere introduced, and some common types of drugs were enumerated~ For the stainless steel material, through theoretical analysis or experiments, a reasonable choice of each component of drugs was determined, which consists of silica, citric acid, hydrogen peroxide, alkylphenolethoxylates, and benzotriazoleas the additiveto the polishing slurry. Furthermore, the optimum content of each additive was determined by orthogonal test. Finally, the optimized CMP polishing slurry was used for the polishing of stainless steel, and the effectiveness of the polishing slurry was verified by comparing the surface roughness before and afier polishing.
出处
《机械设计与制造》
北大核心
2018年第1期73-75,共3页
Machinery Design & Manufacture
基金
广东省科技计划:河源市优势产业标准信息服务共享平台研究(2015A040405007)
广东省科技计划:瓷砖超高压水切割和拼图机器人系统的研发与应用(2015B090922003)
国家火炬计划项目:阳泉市科技型中小企业创新资源共享服务平台(2015GH511343)
关键词
不锈钢
化学机械抛光
抛光液
成分
Stainless Steel
Chemical Mechanical Polishing
Polishing Slurry
Component
