摘要
WNxfilms are deposited by reactive chemical vapor deposition at different amounts of nitrogen in gas mixtures.Experimental data demonstrate that nitrogen amount has a strong effect on microstructure, phase formation,texture morphology, mechanical and optical properties of the WNxfilms. With increasing nitrogen a phase transition from a single WNxphase with low crystallinity structure to a well-mixed crystallized hexagonal WNxand face-centered-cubic W2N phases appears. Relatively smooth morphology at lower N2concentration changes to a really smooth morphology and then granular with coarse surface at higher N2concentration. The SEM observation clearly shows a columnar structure at lower N2concentration and a dense nanoplates one for higher nitrogen content. The hardness of WNxthin films mainly depends on the film microstructure. The absorbance peak position shifts to shorter wavelength continuously with increasing nitrogen amount and decreasing particle size.
WN_x films are deposited by reactive chemical vapor deposition at different amounts of nitrogen in gas mixtures.Experimental data demonstrate that nitrogen amount has a strong effect on microstructure, phase formation,texture morphology, mechanical and optical properties of the WN_x films. With increasing nitrogen a phase transition from a single WN_x phase with low crystallinity structure to a well-mixed crystallized hexagonal WN_x and face-centered-cubic W_2 N phases appears. Relatively smooth morphology at lower N_2 concentration changes to a really smooth morphology and then granular with coarse surface at higher N_2 concentration. The SEM observation clearly shows a columnar structure at lower N_2 concentration and a dense nanoplates one for higher nitrogen content. The hardness of WN_x thin films mainly depends on the film microstructure. The absorbance peak position shifts to shorter wavelength continuously with increasing nitrogen amount and decreasing particle size.
