摘要
基于MEMS工艺制造的薄膜体声波谐振器(FBAR)是一种新型的质量传感器,在气相环境中具有极高的Q值,但在液相环境中,由于液体阻尼作用,FBAR的Q值大幅降低.本文提出了一种谐振器与微流道集成的解决方案,避免了谐振器和液体的大范围接触,有效提高了谐振器的Q值.通过设计新的加工流程,利用标准MEMS工艺实现了微流道和谐振器的集成.将该集成器件用于葡萄糖浓度的检测,结果表明其具有较小的检测极限和极高的线性度.由于充分利用了MEMS技术能进行大批量器件加工的特点,可极大地降低器件成本.集成微流道后,大大降低了样品的使用量,可实现对微升级别样品的检测,在微量检测中具有重要的应用前景.
Film bulk acoustic resonator（ FBAR） based on MEMS fabrication process is a new type of mass sensor with high quality factor Q,and thus it has very high mass sensitivity in the gaseous phase environment. However,when it works in liquid,the value of Q decreases drastically because of acoustic energy damping in the liquid. In this paper,we presented a solution of integrating microchannel and FBAR sensor to reduce the contact area with liquid,effectively improving the Q value. A new fabrication procedure was designed,which realized the integration of microchannel and resonator by using MEMS fabrication process. This device was adopted as a sensor which enjoys relatively low detection limitation and good linearity when detecting different concentrations of glucose. This method takes full advantage of the high yield of MEMS process,greatly reducing the cost of devices. The sensor can realize the measurement of samples in microliter level because of integration with microchannel,which has a significant application prospect in the measurement of micro samples.
出处
《纳米技术与精密工程》
CSCD
北大核心
2017年第6期460-465,共6页
Nanotechnology and Precision Engineering
