摘要
阐述了低温等离子体技术的研究现状及基本原理,介绍了该技术的应用范围及优势,详细阐述了该工艺的关键点,并指出该技术的发展方向。
The article describes low temperature plasma technology research status and basic process characteristics.The paper introduces low temperature plasma technology process.In the characteristics of the process and key points and point out the development technology.
出处
《清洗世界》
CAS
2017年第8期31-34,共4页
Cleaning World
关键词
低温等离子体
VOC治理
废气治理
low temperature plasma
VOC governance
waste gas pollution control detail elaborated direction of the