摘要
主要研究基于边缘电场传感器的位移测量方法,由于在测量位移时交叉指型传感器互导电容的变化具有周期性,因而可以实现大范围的位移测量。运用Ansoft Maxwell有限元仿真软件对边缘电场传感器的二维半波长模型进行了仿真分析,仿真结果表明当传感器工作区间内有物体移动时,会改变传感器的电场分布,使传感器互导电容发生周期变化。设计了一个简单的、低成本的调理电路,可以将电容变化转化为电压输出信号,得到边缘电场传感器输出电压与电容的关系。对电极尺寸为35 mm×30 mm×0.02 mm的边缘电场传感器进行了测量实验,实验结果与仿真结果吻合较好。
This paper is focused on a displacement measuring method based on Fringing Electric Field Sensors,which can realize a wide range of displacement measurement because of the periodicity in changes of the mutual capacitance of the interdigitated structure in displacement measurement.The two dimensional model of the Fringing Electric Field Sensors was simulated and analyzed by Ansoft Maxwell.The results show that when the target is moving in the working range of the sensor,the distribution of the Fringing Electric Field Sensors will change,resulting in periodic variation in mutual capacitance.A simple and low cost conditioning circuit is designed,which can convert the capacitance to voltage output signal,and then the relationship between the output voltage and the capacitance of the sensor is obtained.Experiments were carried out on the Fringing Electric Field Sensors with the electrode size of 35×30×0.02mm3,and the results were in good agreement with the simulation results.
出处
《传感技术学报》
CAS
CSCD
北大核心
2017年第4期506-511,共6页
Chinese Journal of Sensors and Actuators
关键词
边缘电场传感器
有限元
互导电容
调理电路
fringing electric field sensors
finite element
mutual capacitance
conditioning circuit
