摘要
在温度传感器校准中,用激光光束对其进行加热,由于激光呈高斯分布,为了使传感器受热均匀,需要能量均匀分布的激光光束。为此,研究了激光匀束的方法,最终选用结构简单、对入射光束变化不敏感且可以承受大功率的衍射型微透镜阵列对激光进行整形。运用ZEMAX光束仿真软件进行仿真分析,通过对子透镜尺寸、透镜间距离、光束发散角等因素的对比分析,优化出较合适的参数。搭建实验平台,对实际效果进行验证,得到一个不均匀度为8.9%,能量损耗为7%的一个平顶光束。减小传感器校准误差,同时极大的提高了激光的利用率。
In the calibration of the temperature sensor, it uses laser beam to heat. Due to the Gaussian distribution of the laser, it needs the homogenized laser beam to make the sensor heated evenly. Therefore, this paper studies on the laser homogenization. Shape the laser beam by diffraction micro lens array with simple structure, which is insensitive to the changes of incident beam and can bear high power. Simulation analyzing the size of sub lens, the distance between lens, divergence angle and other parameters to get the optimal parameters by ZEMAX software. An experimental platform was setup to verify the actual effect. Finally, getting a flat top beam in the condition of 8.9% uneven- ness and 7% energy consumption. It reduced the calibration error and improved utilization.
出处
《激光杂志》
北大核心
2017年第7期44-47,共4页
Laser Journal
基金
国家自然科学基金(51575499)
