摘要
随着纳米光电子学及生物医学组织工程领域的发展,器件的小型化、结构多样化及高度集成化,给微纳结构与器件制造领域带来了新的挑战。本文围绕飞秒激光双光子聚合技术,简要综述了双光子光聚合基本原理与双光子引发剂分子的研究进展,并对飞秒激光双光子聚合技术在功能微纳结构与器件制备中的应用及发展前景进行了展望。
Accompanying the development of nanophotonics, nanoelectronics and biomedical tissue engineering, the miniature of the device, the structure variety and the highly integration make new challenges to micro/nanostructure and device manufacturing. In this paper, the two-photon polymerization technique, the principle of two-photon polymerization, the research progress of two-photon photoinitiator, and the application offabricating functional micro/nanostructure and device by two-photon polymerization technique have been reviewed and discussed.
出处
《影像科学与光化学》
CAS
CSCD
北大核心
2017年第4期413-428,共16页
Imaging Science and Photochemistry
基金
国家自然科学基金项目(91323301
91123032
61475164)
国家重点基础研究发展规划973项目(2010CB934103)
国家重点研发计划项目(2016YFA0200501
2016YFC1100502)
关键词
飞秒激光
双光子光聚合
引发剂
功能微纳结构
femtosecond laser
two-photon polymerization
photoinitiator
functional micro/nanostructure