摘要
基于高性能的微电子机械系统(MEMS)工频电场传感器系统开展了高压架空输电线下电场测量应用研究。为了获得电场分布规律,基于模拟电荷法,建立了输电导线的二维电场计算通用模型。传感器系统核心敏感芯片基于电荷感应原理,采用MEMS技术加工制作。在0~1 000 kV/m工频电场范围内,传感器系统的总不确定度为1.53%,分辨力达到了20 V/m。仿真与测试结果表明:35 kV与10 kV输电线下的电场计算结果与传感器系统的测量结果偏差分别为6%和10%,并与传统的Narda EFA—300电磁场分析仪测量结果具有较好的一致性。
Electric field measurement under high voltage overhead transmission using a high-performance MEMS electric field sensor is presented. To study the distribution of electric field under high voltage overhead transmission lines,based on the charge simulation method,a generic model for two-dimensional electric field calculation is established. To measure the electric field distribution,a novel measurement system of wireless transmission based on high-performance MEMS electric field sensing chips is introduced. Tested in ambient air conditions,the minimum detectable field of the system is approximately 20 V/m,with an uncertainty of 1. 53 % in working frequency electric field range 0 - 1 000 kV/m. The simulation and test results show that the deviation between the calculation results and the test results of the system for electric field under 35 kV and 10 kV transmission lines is 6 % and 10 %,respectively,and the plotted curves of the system are consistent with traditional Narda EFA—300 electromagnetic field analyzer.
出处
《传感器与微系统》
CSCD
2017年第6期154-156,160,共4页
Transducer and Microsystem Technologies
基金
国家"863"计划资助项目(2015AA042602)
中国南方电网有限责任公司科研项目(K-YN2014-186
YNKJXM00000293)
关键词
电荷模拟法
工频电场
微电子机械系统
电场传感器
charge simulation method（CSM）
power frequency electric field
micro-electro-mechanical system（MEMS）
electric field sensor
