摘要
本文基于微压差装置整体漏率的传统测试方法中误差产生原因,选择刚性容器替代大气作为压强测量基准,通过温度计精确测量了微压差装置和基准容器的温度,并采用温度补偿修正泄漏差压以获得整体漏率。通过刚性容器膨胀实验对该方法进行验证,以密闭氧气枕为缩比模型,测量了500Pa微正压下的漏率,结果显示该方法可以获得良好的测量重复性,相对误差低于15%,为微压差装置整体漏率的精确测量奠定了技术基础。
In this paper, the total leak rate of minute differential pressure device was measured accurately based on the parameter compensation method. To avoid the measurement errors in the traditional method, a rigid container was used to replace the atmospheric environment as the standard of pressure variation. The temperature gauges were used for accurate temperature measurements of the minute differential pressure device and the reference container. The total leak rate was then calculated using the leak differential pressure, which was corrected by temperature compensation based on a mathematical model. The temperature compensation has been verified by the free expansion of gases based on metal containers. The leak rate through an airtight oxygen bag was measured with a minute differential pressure of 500 Pa. The results have a good repeatability and are in good agreement with the leak rate of the standard leak within 15%. It could be achieved to lay a solid foundation for precise total leak rate measurement of the minute differential pressure device.
出处
《真空》
CAS
2017年第3期27-31,共5页
Vacuum
关键词
微压差
整体漏率测量
基准物
温度补偿
Minute differential pressure
Total leak rate measurement
Reference chamber
Temperature compensation
