摘要
射频离子源具有的复杂电磁环境会干扰甚至使得朗缪尔单探针无法准确获得等离子体参数。双探针具有对等离子体的干扰较小,不需要参考电位等优点,因此更加适用于射频离子源下的等离子体诊断。为了使得朗缪尔双探针更加精确地测量电子温度与离子密度,必需在测量电路中增加针对干扰源频率的滤波电路系统。本文针对射频离子源等离子体诊断设计了探针测量电路,并进行了仿真计算和分析,结果表明:探针的抗干扰能力与测量精度均具有明显的改善。
Here, we experimentally addressed thenegative influence of the RF ion source,especially the perturbation of the complex electromagnetic environment involved, on the precision of the properties measurement with a single Langmuir probe of the RF plasma generated by the RF ion source,including the electron temperature and ion density. The proposed solution was a novel type of double Langmuir probe with a newly-designed filter to eliminate the discharge-induced interference and the troublesome harmonics. The measurement circuit for the new double Langmuir probe were numerically simulated with software Multisiml3 and experimentally tested. The simulated and measured results show that the newly designed double Langmuir probe significantly improves the measurement accuracy of the plasma behavior because of much increased interference resistance.
出处
《真空科学与技术学报》
CSCD
北大核心
2017年第5期484-487,共4页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金资助项目(11405207
11505224
11505225)
关键词
朗缪尔探针
等离子体
射频
谐振电路
Langmuir probe,Plasma, Radio frequency, Resonant circuit
