摘要
介绍基于LTCC技术的无源气压传感器的基本原理和理论模型,主要制作工艺流程和关键工艺难点。研究了LTCC内埋型空腔的实现方法、牺牲层材料的选取和依据,并对无源气压传感器的理论模型进行仿真分析与实际测试。结果表明利用LTCC内置空腔技术研制的气压传感器测试结果与仿真分析吻合较好,谐振频率随外界压力的增大而减小,谐振频率随压力的变化近似于线性变化,在复杂环境内依然能够实现预期功能。
In the paper, the basic principle and theoretical model of passive atmospheric pressure sensor based on LTCC technology, the main process and the key technology are presented. The paper mainly studies the realization method of LTCC buried cavity and the selection principles of sacrifice layer material. Then the simulation analysis and test are performed. The result shows that the structure of the atmospheric pressure sensor based on LTCC is relatively consistent with the simulation analysis. The resonant frequency decreases with the increase of external pressure. The resonant frequency linearly changes with the pressure. In the complex environment, the sensor is still functional.
出处
《电子与封装》
2017年第5期5-7,15,共4页
Electronics & Packaging
