摘要
光纤法布里-珀罗干涉温度和压力传感器具有灵敏度高、制作简单、成本低、体积小和抗电磁干扰能力强等优点,已被广泛应用于军事和民用领域.在某些环境恶劣,如具有强电磁干扰和腐蚀性,或提供给传感器的安装空间非常有限的特殊工业领域,微型光纤温度和压力传感器发挥着重要的作用,国内外诸多高校、科研院所都在对其进行研究.本文综述了光纤法布里-珀罗干涉仪的基本原理、制备技术、及其压力和温度传感应用的研究进展.详细介绍了湿法化学腐蚀制备法、电弧放电制备法、飞秒激光制备法、聚合物辅助制备法等常见光纤法布里-珀罗腔传感器的制作工艺,分析了不同制作工艺的优缺点;详细介绍了光纤法布里-珀罗干涉仪在温度传感、压力传感和温压一体传感领域的应用;最后对光纤法布里-珀罗干涉温度压力传感器的发展进行了总结和展望.
Optical fiber sensors based on Fabry-Perot interferometer （FPI） have attracted intensive attention for sensing ap- plications in temperature and pressure measurement, owing to their compact, small size, fast responses, high resolution, high sensitivity, good stability, and resistance to electromagnetic interference. It＇s known that the in-fiber optic inter- ferometers based on single-mode fibers can exhibit compact structures, easy fabrication and low cost. In this paper, firstly, the basic principle of in-fiber FPIs is introduced. Secondly, we review several kinds of typical in-fiber FPIs formed in single-mode fibers fabricated with different post-processing techniques, such as chemical etching, arc discharge, fem- tosecond laser micromachining, and polymer coating, etc. Finally, the optical sensors based on in-fiber FPIs, with a capability of simultaneous multi-parameter sensing of temperature and pressure, are summarized and prospected.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2017年第7期87-103,共17页
Acta Physica Sinica
基金
国家自然科学基金(批准号:61635007
61425007
61377090
61575128)
广东省自然科学基金(批准号:2014A030308007
2014B050504010
2015B010105007
2015A030313541)
深圳市科技创新委员会项目(批准号:GJHZ2015031309375575
JCYJ20160520163134575
JCYJ20160427104925452)
珠江学者项目资助的课题~~
