摘要
在片散射参数的精确测量离不开传输线特征阻抗的精确定义。介绍了基于Multi-TRL算法的共面波导型传输线特征阻抗的定标方法,具体包括对Multi-TRL校准算法进行推导和优化得到传播常数,再利用传播常数计算得到传输线特征阻抗。在此基础上,开发了传输线特征阻抗提取软件wyb,并对特征阻抗测试结果进行了验证。测量片上参考标准RM8130上的校准标准,分别作为wyb软件和Wincal软件的输入量来提取特征阻抗。数据表明:在5~10GHz频段内,特征阻抗幅值相差小于±0.6%,相位相差小于±0.55°;在10~40GHz频段内,特征阻抗幅值相差小于±0.2%,相位相差小于±0.40°。
On wafer S-parameter accuracy mainly depends on the characteristic impedance of transmission line standard. An accurate method of determination of characteristic impedance of coplanar waveguide is researched, which involves the deduction and optimization of Multi-TRL （ Muhi-Thru Reflect Line ） algorithms to obtain the propagation constant, and uses the propagation constant determines characteristic impedance. The extraction software ＂wyb＂ of propagation constant and characteristic impedance were developed, and the method was validated against commercial Multi- TRL software Wincal by the same input of the measurements of calibration standards at on-wafer reference material RM8130. The result shows that, between 5 ~ 10 GHz, the relative error of the magnitude of characteristic impedance is within ±0. 6%, and the phase is within ±0. 55°. As frequency goes above to 40GHz , the relative error of the magnitude of characteristic impedance is within ±0. 2%, the phase error within ±0.4°.
出处
《计量学报》
CSCD
北大核心
2017年第2期225-229,共5页
Acta Metrologica Sinica
关键词
计量学
特征阻抗标准
传输线
Multi—TRL
传播常数
metrology
characteristic impedance standard
transmission line
Muhi-TRL
propagation constant
