摘要
提出了一种基于飞秒激光加工技术制作的微纳光纤高温压力传感器。用飞秒激光在光纤端面加工出法珀腔,制作出的全光纤法珀干涉型压力传感器,从室温到1100℃范围进行了压力温度试验。在不同温度下,压力传感器都有良好的线性输出特性,短时间工作温度超过1100℃,能够满足高温环境下压力测量的需求。
A novel micro fiber optic high-temperature pressure sensor based on femtosecond laser processing technol- ogy is designed and manufactured. The sensor is a Fabry-Perot cavity which is manufactured on the end of the fiber end- face. The interferometric pressure sensor possesses high sensitivity, high resolution and can work under an extreme high temperature（as high as 1100℃）circumstance. The linear output property is achieved at different temperature. It is a promising sensor to measure the pressure in high temperature applications.
作者
江毅
马维一
陈淑芬
王素梅
李宝娟
JIANG Yi MA Weiyi CHEN Shufen WANG Sumei LI Baojuan(School of Opto-electronics, Beijing Institute of Technology, Beijing 100081, China Laser Micro/Nano Fabrication Laboratory, Beijing Institute of Technology, Beijing 100081, China Beijing Shougang Co. , LTD, Qianan 064400, China)
出处
《光学技术》
CAS
CSCD
北大核心
2017年第1期12-15,共4页
Optical Technique
基金
国家863项目(2015AA043504)
国家自然科学基金(61575021)
航空航天基金(2015ZD72008)资助
关键词
高温传感器
压力传感器
飞秒激光加工
外腔式光纤法珀干涉仪
high-temperature sensor
pressure sensor
{emtosecond laser fabricating
fiber optic extrinsic Fabry-Per-ot interferometer
