摘要
根据气密封装器件的内部气体流动原理,对光电耦合器内部气氛含量的初始状态进行了分析,对长期贮存的变化状态进行了预测,随后采用内部气氛分析仪验证预测结果,证明了气体流量原理能够有效预测光电耦合器封装内部的气氛含量,并且能够将封装工艺的薄弱环节暴露在检测初始阶段。通过分析测量漏率与真实漏率之间的关系,对提高预测光电耦合器内部气氛含量长期贮存变化的准确性提出了建议。
According to the internal gas flow principle of hermetic sealing device,the author first analyzed the initial state of the internal atmosphere content of photoelectric coupler and predicated the change status of long-term storage. Then,the prediction results verified through the internal atmosphere analyzer,proved that the gas flow theory could effectively predict the internal atmosphere content sealed in the photoelectric coupler and expose the weak links of encapsulation process in the initial stage of detection. Besides,analyzed the relationship between the measuring leakage rate and the actual leak rate,suggestions were proposed for prediction accuracy of internal atmosphere long-term storage change in the photoelectric coupler.
出处
《电子器件》
CAS
北大核心
2016年第6期1292-1296,共5页
Chinese Journal of Electron Devices
基金
广东省自然科学基金项目(2015A030310331
2015A030306002)
关键词
光电耦合器
长期贮存
气体流动原理
内部气氛变化
photoelectric coupler
long-term storage
gas flow principle
internal atmosphere change
