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CMM机构误差引入的空间点不确定度评定 被引量:3

Evaluation of space coordinate uncertainty performed by CMM's mechanism error
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摘要 提出了一种坐标测量机空间点测量不确定度的评定方法。在坐标测量机的准刚体模型下,通过坐标系旋转矩阵建立空间坐标点的三维测量模型;依据A类和B类评定方法,通过误差检测实验,量化21项机构误差所引起的不确定度分量;最后,根据测量不确定度表示指南(GUM)评定三坐标测量机机构误差引入的空间任一点的三维标准不确定度。采用Renishaw激光干涉仪对一台未经过误差补偿的三坐标测量机进行误差检测并评定出机构误差引入空间点的三维不确定度,验证了该方法的可行性,使得基于GUM评定CMM的测量不确定度成为可能。 A method for evaluating the space coordinate uncertainty performed by coordinate measuring machine is proposed. Mathematical measuring model of space coordinate is established by rotating the matrix of coordinate system under the condition of the quasi rigid body model of coordinate measuring machine( CMM) uncertainty components caused by 21 items mechanism errors are quantified by the experiment of mechanism error detection based on the type A and B evaluation of uncertainty. Finally,the uncertainty of CMM's mechanism error for 3D space coordinate measurement is evaluated based on guide to the expression of uncertainty in measurement( GUM). The experiment of mechanism error detection based on Renishaw laser interferometer and uncertainty evaluation of space coordinate for CMM which without error compensation is done to verify the feasibility of the method. The method presented in this paper makes it possible to evaluate the uncertainty of CMM by GUM.
作者 徐磊 陈晓怀 程银宝 姜瑞 李红莉 Xu Lei Chen Xiaohuai Cheng Yinbao Jiang Rui Li Hongli(School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Hefei 230009, Chin)
出处 《电子测量与仪器学报》 CSCD 北大核心 2016年第12期1892-1898,共7页 Journal of Electronic Measurement and Instrumentation
基金 国家自然科学基金(51275148) 中央高校基本科研业务费专项资金(JZ2016HGBZ0764)资助项目
关键词 三坐标测量机 机构误差 误差检测 不确定度评定 CMM mechanism error error detection uncertainty evaluation
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