摘要
针对片上光互连用光源对谐振腔单色性、可调性的要求,基于互补金属氧化物半导体技术和绝缘衬底上的硅材料,设计并制作了一种基于微环谐振腔的可调谐硅基反射腔镜。利用转移矩阵方法分析了该反射腔的性能,发现该反射腔具有较好的尖锐度和消光比。实验结果表明,该反射腔在波长1549nm处反射率可达90%,品质因素Q值为3×104,自由光谱范围（FSR）为9.6nm。通过对微环谐振腔进行热光调制,在0~40.5mW功率范围内实现了在FSR内的波长可调。
Considering the requirement of monochromaticity and tunability for resonator used in on-chip optical interconnect source,we design and make a tunable silicon reflection cavity mirror based on microring resonator,using complementary metal-oxide-semiconductor technology and silicon material on insulating substrate.The performance of the reflection cavity is analyzed by the transfer-matrix method,and we find that the reflection cavity shows good properties in sharpness and extinction ratio.The experimental results show that the reflectivity of the reflection cavity can reach 90% at the wavelength of 1549 nm,the quality factor is 3×104,and the free spectral range（FSR）is 9.6nm.By applying the thermo-optic modulation to the microring resonator,the wavelength tunability in FSR can be realized within the power range of 0-40.5mW.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2016年第12期259-264,共6页
Acta Optica Sinica
基金
国家973计划(2013CB632105)
国家自然科学基金(61177055
61307074)
浙江省杰出青年基金(LR15F050002)
关键词
光学器件
反射腔
热调特性
微环谐振腔
optical devices
reflection cavity
thermal tuning property
microring resonator
