摘要
最近几年,我国的微机电系统和机械零件制造业在社会经济发展的影响下,呈现出突飞猛进的发展势头。精密超精密加工技术也对我国的航天、国防和微电子工业等行业发展起到了至关重要的促进作用。因此,在微机械制造中运用精密超精密加工技术,不但能够使我国的微机械零件制造水平得到提升,还能带动我国微机械制造业进一步的发展。
In recent years, under the influence of the social and economic development, China^s micro electromechan-ical system and mechanical parts manufacturing industry presents a rapid development trend. Precision ultra preci-sion machining technology has played a crucial role in promoting the development of China＇s aerospace, defense and micro electronics industry. Therefore, the use of precision ultra precision machining technology in micro machinery manufacturing, not only can make the level of China＇s micro machinery parts manufacturing to be improved, but also led to the development of micro machinery manufacturing industry in China.
出处
《河南科技》
2016年第23期85-86,共2页
Henan Science and Technology
关键词
微机电系统
精密超精密加工技术
微机械制造
micro electro mechanical system
precision ultra precision machining technology
micro mechanical man-ufacturing
