摘要
针对真空泵抽速测量中广泛应用的普通滴管式气体流量测量装置与方法进行改进研究,提出一种基于称重原理的滴管式气体流量测量新方法。在贮液槽下安置电子称,以称量进入滴管中的油液的质量来代替测量液位上升的高度;推导出对应的气体流量计算公式,介绍了具体操作步骤;对照原测量方法的不足之处,分析了称重法滴管式气体流量测量装置与方法的特点。这一改进可为实现真空泵抽速及微小气体流量的自动化测量提供理论支撑和参考方法。
The device and method of common dropper type gas flow measurement of a wide range of applications for measuring the vacuum pumping speed were modified and researched. A new method of dropper type gas flow measurement based on the weighing principle was proposed. Electronic scale placed under the reservoir is to weigh the quality of oil into dropper instead of measuring the height of liquid level rise; The corresponding calculation formulas of gas flow were deduced and the concrete operation steps were introduced;The characteristics of dropper type gas flow measurement device and method based on the weighing principle was analyzed comparing the disadvantages of the original measuring method. This improvement can be achieved for the vacuum pump pumping speed and small gas flow automatic measurement to provide theoretical support and reference method.
作者
张世伟
孙坤
张志军
韩进
张明达
李玉英
ZHANG Shi-wei SUN Kun ZHANG Zhi-jun HAN Jin ZHANG Ming-da LI Yu-ying(School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China Shenyang Vacuum Technology Institute, Shenyang 110042, China)
出处
《真空》
CAS
2016年第6期19-23,共5页
Vacuum
关键词
气体流量测量
滴管
称重原理
gas flow measurement
dropper
weighing principle
