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TiCrAlSiCN薄膜微观结构与性能 被引量:3

Microstructure and properties of TiCrAlSiCN coating
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摘要 采用工业化多弧离子镀在H13钢表面制备高硬度、高结合强度和低摩擦耐磨的TiCrAlSiCN硬质薄膜,以便改善H13钢的力学和摩擦学性能。借助扫描电子显微镜、X射线衍射、X射线光电子能谱仪、透射电子显微镜、维氏显微硬度计、膜划痕试验法、摩擦磨损仪对TiCrAlSiCN薄膜的结构特征、力学性能和摩擦磨损性能进行测试与分析。结果表明,TiCrAlSiCN薄膜结构为纳米晶/非晶复合结构。高Si含量的TiCrAlSiCN薄膜200晶面呈择优取向、硬度为3934 HV0.01和2536 HV0.025、摩擦因数为0.65、磨损率为7.36×10^(-6)mm^3·N^(-1)·m^(-1)、膜基结合力为62.4 N。随Si含量降低,Cr和C含量增大,薄膜无明显的择优取向,开始向各向同性转变,硬度为3613 HV0.01和2815 HV0.025、摩擦因数为0.48、磨损率为7.28×10^(-6)mm^3·N^(-1)·m^(-1)、膜基结合力为68.2 N。低Si含量TiCrAlSiCN薄膜力学和摩擦学性能优异。 TiCrAlSiCN hard coatings were fabricated on H13 steel using an industrial multi-arc ion plating to improve the properties of H13 steel. By means of scanning electron microscopy( SEM),X-ray diffraction( XRD),X-ray photoelectron spectroscope( XPS) and transmission electron microscopy( TEM),the microstructure of TiCrAlSiCN coatings with different Si and C contents were analyzed. At the same time,the mechanical and tribological properties of the coatings were investigated by microhardness,bonding strength and friction and wear tests. The results show that the coatings contain a composite structure of nanocrystalline and amorphous phases. The coatings with high Si and low C contents exhibits a strong( 200) preferred orientation,microhardness values of 3934 HV0. 01 and 2536 HV0. 025,friction coefficient of 0. 65,wear rate of 7. 36 ×10^-6mm^3·N^-1·m^-1 and bonding force of 62. 4 N. A decrease of Si content resulted in an increase of Cr,Al and C content,and the coatings don't exhibit an obvious preferred orientation and presented the transition from preferred orientation to isotropy. More importantly,this coating with low Si content possess wonderful properties combined with high hardness values of 3613 HV0. 01 and 2815 HV0. 025,the friction coefficient of 0. 48,wear rate of 7. 28 ×10^-6mm^3·N^-1·m^-1 and bonding force of 68. 2 N.
出处 《金属热处理》 CAS CSCD 北大核心 2016年第11期16-20,共5页 Heat Treatment of Metals
关键词 TiCrAlSiCN薄膜 复合结构 硬度 韧性 结合强度 磨损率 摩擦因数 TiCrAlSiCN coating composite structure hardness toughness bonding strength wear rate friction coefficient
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