摘要
为探究射频离子源驱动器线圈电气参数对射频放电的影响,主要进行了射频离子源等离子体激发的物理分析,并计算了射频电源的频率选择与线圈放电电流、线圈匝间电压以及放电气压之间的关系,设计了射频离子源驱动器的主要参数。研制的射频离子源驱动器装置,成功获得氢等离子体射频放电。实验结果和理论计算结果符合很好。
To explore the influence of the RF ion source driver coil electric parameters on the RF discharge, the physical analysis of RF ion source plasma excitation was carried out, and the relationship between the frequency selection of RF power source and coil discharge current, coil voltage and discharge pressure was studied. The main parameters of RF ion source driver was designed, the RF ion source driver device is developed. The last device obtained successfully hydrogen plasma RF discharge. The experimental results and theoretical calculation results accord with well.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
2016年第3期243-246,共4页
Nuclear Fusion and Plasma Physics
基金
国家磁约束核聚变能发展研究专项(2013GB101000
2013GB101001)
国家自然科学基金(11405207)
