摘要
超材料吸收器的高吸收率源于表面金属颗粒与介质层之间产生的局域等离激元共振以及由金属颗粒-介质层-金属反射层构成的微腔所导致的共振吸收。其吸收特性与金属颗粒的尺寸、形貌和介质层的材料和厚度密切相关。设计优化了一个在近红外波段1.2μm处具有近完美吸收的超材料吸收器。以该设计为蓝图,利用纳米压印技术制备了一系列具有不同介质层厚度的器件,并利用红外反射谱定量研究了这些器件的吸收特性。实验结果证实,用纳米压印技术制备的超材料器件具有工艺可靠性好、加工精度高等优点。实验测得的吸收率变化趋势与理论预期相符,吸收率较高。
The high absorptivity of metamaterial absorbers originates from the local surface plasmon resonance （LSPR） in the interface between metal nanoparticles and dielectric medium as well as the resonant absorption induced by the microcavity composed of a metal nanoparticle layer, a dielectric medium layer and a metal reflector layer. The absorbance of a metamaterial absorber is closely related to the size and shape of nanoparticles and the material and thickness of dielectric medium. A metamaterial absorber which has nearly perfect absorption at the wavelength of 1.2 μm in the near infrared waveband is designed and optimized. Taking this design as a blueprint, a series of devices with different dielectric medium thicknesses are prepared by using the nanoimprint lithography （NIL）. The absorption properties of these devices are studied quantitatively by using the reflection absorption spectroscopy. The experi-mental results show that the metamaterial devices prepared by NIL have the advantages of good process reliability and high machining precision. The absorption change trend measured in experiment is consis-tent with the theoretical expectation and the absorption is high.
出处
《红外》
CAS
2016年第8期7-14,共8页
Infrared
基金
国家自然科学基金项目(61474130)
关键词
超材料吸收器
LSPR
纳米压印
metamaterial absorber
local surface plasmon resonance
nanoimprint lithography
