摘要
针对超精密传动机构定位精度高、行程大、运行平稳、激励振动小、系统可靠性高的要求,设计了一种双圆弧型驱动轮摩擦副的超精密摩擦传动机构,与圆柱型驱动轮摩擦副、双V型驱动轮摩擦副的结构相比,减小了接触应力,提高了接触刚度。应用赫兹接触理论对摩擦副的接触区域中最大接触应力以及接触变形量进行分析。实验表明该摩擦传动机构在300 mm全行程范围内,定位精度±10 nm。
The high-precision driving mechanism needs large travel, high positioning accuracy, steady operation, small vibration, high-reliability, and high repetitive positioning precision. In order to satisfy the above requirements it is desirable to use ultra-precision friction driving mechanism with dual arc model driving wheel friction pair. Compare with cylinder model driving wheel friction pair and double-V model driving wheel friction pair, contact stress lessening and contact stiffness increases. The application of the theory of Hertz contact analysis contact stress and elastic deformation of driving wheel friction pair. The experiment resut shows the friction drive with ± lOnm positioning accuracy through the full travel （300 mm）.
出处
《机械设计与研究》
CSCD
北大核心
2016年第4期64-67,共4页
Machine Design And Research
关键词
摩擦传动
超精密定位
定位精度
赫兹接触
friction drive
ultra-precision positioning
positioning accuracy
Hertz contact
