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介电泳抛光专用高压可调电源的研制 被引量:1

Development of dedicated high voltage power supply apply to dielectrophoresis polishing
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摘要 针对介电泳抛光对电源电压、频率、波形有特殊要求这一问题,对电源的信号发生电路,信号放大电路,直流升压电路,光耦及逆变电路等方面进行了研究和归纳,研制了一套适用于介电泳抛光的专用高压可调电源。通过直流升压电路为IGBT(Insulated Gate Bipolar Transistor)逆变电路提供了电压,单片机通过IGBT光耦驱动来控制IGBT模块的开关状态,最终将逆变电路中负载电阻两端的电压并联到抛光机上、下盘的电极。利用介电泳抛光加工与传统抛光加工的对比实验对高压可调电源进行测试。研究结果表明,电源各项指标均达到设计要求,且使用该电源的介电泳抛光材料去除率提升了15.5%,验证了这种高压可调电源原理的可行性及工程应用价值。 Aiming at the problem of high performance requirements of the power supply on dielectrophoresis polishing,the signal generating circuit,signal amplification circuit,DC-DC booster circuit,optical coupling and inverter circuit were studied and summarized,a set of suitable for dielectrophoresis polishing dedicated high voltage power supply was developed. The working principle of high voltage power supply:DC-DC( direct current) boost circuit provides high voltage to IGBT( Insulated Gate Bipolar Transistor) inverter bridge circuit. SCM( Single Chip Micyoco) through IGBT optocoupler drive to control the switch state of IGBT module. Eventually voltage at load resistor in inverter circuit was sent to the electrodes in upper and lower plates in polishing machine which is in parallel with load resistor. The high voltage power supply was tested by using the contrast experiment of the dielectrophoresis polishing and the traditional polishing. The results indicate that all the indexes of high voltage power supply meet the design requirements and dielectrophoresis polishing material removal rate increased by 15.5%,which verified the feasibility and engineering application value of this high voltage power supply.
出处 《机电工程》 CAS 2016年第8期1012-1015,1038,共5页 Journal of Mechanical & Electrical Engineering
基金 国家自然科学基金资助项目(51275476) 浙江省科技创新团队资助项目(2011R50011-06)
关键词 介电泳 高压 可调 IGBT dielectrophoresis high voltage adjustable insulated gate bipolar transistor(IGBT)
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