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沉积条件对低温各向同性热解炭形貌的影响

Effect of deposition conditions on morphology of low temperature isotropic pyrocarbon
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摘要 研究沉积温度和丙烷气体体积分数对低温各向同性热解炭(LTIC)形貌的影响,并用成核-生长理论解释材料形貌的成因。该热解炭材料由不同体积分数的丙烷通过准稳态流化床化学气相沉积法(FBCVD)在1 250~1 450℃的沉积温度下得到。研究结果表明:随着沉积温度或丙烷气体体积分数的升高,各向同性热解炭的类球形颗粒状形貌越来越明显,且密度降低,沉积过程由生长模式向成核模式过渡。沉积模式随沉积条件的改变会决定热解炭形貌的改变,而这些变化与气相中形成的线性分子和小分子芳烃与稠环芳香烃(PAHS)的比以及液滴的黏度改变有关。 The effects of deposition temperature and propane volume fraction on the morphology of low temperature isotropic pyrocarbon (LTIC) were investigated and the morphology of deposits was accounted by the principle of nuclei-growth. The pyrocarbon was prepared by a quasi-steady-state fluidized bed chemical vapor deposition (FBCVD) with the deposition temperature from 1 250 ℃ to 1 450 ℃ and different propane volume fractions. The results show that the structure dominated by the presence of globular features of LTIC is more obvious as increasing the deposition temperature or propane volume fractions, with the transition from growth mode to nucleation mode in the deposition process, and the density is lower. The pyrocarbon morphology can be determined by deposition mode with deposition conditions, which is correlated to variations in the proportion of linear molecules and small aromatic hydrocarbons to polycyclie aromatic hydrocarbons (PAHS), besides the viscosity of the droplets.
出处 《中南大学学报(自然科学版)》 EI CAS CSCD 北大核心 2016年第7期2221-2226,共6页 Journal of Central South University:Science and Technology
基金 国家自然科学基金资助项目(50975070) 浙江省自然科学基金资助项目(LY12E05002)~~
关键词 化学气相沉积 低温各向同性热解炭 沉积条件 形貌 沉积机理 chemical vapor deposition low temperature isotropic pyrocarbon deposition conditions morphology deposition mechanism
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