摘要
超声信号能引起SU-8材料的厚度变化,将一薄层厚度均匀的SU-8膜镀在盖玻片上,再镀一层均匀金属银制成光滑反射面,制作了一个光声传感器,并借助此传感器计了一套实时、动态的光声成像系统。该光声成像系统中,吸收性样品的光声信号引起光声探测器上SU-8材料厚度变化,当一束激光经过探测器反射面时,该厚度变化将会调制反射光的相位,系统借助光学相衬滤波法解调该相移,得到SU-8的厚度变化量,获取与样品光声信号的分布对应的光强分布,从而获得样品的动态实时光声像。对光声信号的产生(光致超声效应)、光声信号的调制、光声信号的解调(传感器的制作)进行了论述,并对SU-8光声探测器对光声信号的感应特性做了初步实验研究,结果验证了SU-8能够探测光声信号。
Ultrasonic signal can cause the SU-8 material thickness change. Based on this, a uniform thin layer thickness of the SU-8 film is plated on the cover glass, the smooth reflecting surface is coated with a layer of uniform metal silver, and then a photoacoustic sensors is made. And a set of real time, dynamic photoacoustic imaging system is proposed based on the sensor. In this system, the photoacoustic signal of absorbent sample causes the SU-8 material thickness change on the photoacoustic detector. When the laser through the reflector of detector, the changes of thickness will modulate the phase of reflected light. The phase shift is demodulated using the optical phase contrast filter method, and the thickness variation of SU-8 is obtained. The corresponding light distribution of photoacoustic signal of samples is acquired, and the dynamic real time photoacoustic images are obtained. The generating （ultrasonic effect）, modulation and demodulation （production of the sensor） of photoacoustic signals are discussed. The response characteristics of photoacoustic signals are studied experimentally by SU-8 photoacoustic detector, and the results indicate that SU-8 can detect photoacoustic signals.
出处
《激光与光电子学进展》
CSCD
北大核心
2016年第7期216-221,共6页
Laser & Optoelectronics Progress
关键词
成像系统
SU-8光声传感器
相衬
光声成像
imaging systems
SU-8 photoacoustic sensor
phase contrast
photoacoustic imaging
