摘要
压电陶瓷是一种重要的精密驱动器件,广泛应用于国防工业和民用生活中的高精度测量。本文根据压电陶瓷的工作原理,利用激光干涉法,构建了一套快速检测压电常数的原理样机。测试实验结果表明,其检测精度高,稳定性好,具备开发成专用压电常数测量装置的可能。
The piezoelectric ceramic is an important driver which is widely applied in precision measurements of the defense industry and civilian life. Based on working principle of piezoelectric ceramics,the out-plane displacement of a sample was measured with laser interferometry rapidly and accurately. The piezoelectric constant of the tested sample was also analyzed in this paper. It was demonstrated that this new prototype could be applied to measure piezoelectric constant of ceramic rapidly and could be a novel practical method for piezoelectric constant measurement.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2016年第5期1574-1577,共4页
Bulletin of the Chinese Ceramic Society
基金
湖北省高等学校教学研究项目(JYS14001)
中南民族大学实验室开放与技改项目(JG2014013)
关键词
压电陶瓷
激光干涉测量
离面位移
压电常数
原理样机
piezoelectric ceramics
laser interferometry
out-plane displacement
piezoelectric constant
prototype
