摘要
以固态聚二甲基硅氧烷(PDMS)为泵体材料,设计了压电振子的支承方式,采用双腔串联结构,由PDMS双腔串联压电泵驱动。分别用蒸馏水、柠檬酸钠溶液、氯金酸溶液3种流体测试了PDMS压电微泵的工作性能,证明该电泵不仅能够输送低粘度液体(如水),对于粘度较高的流体(如一些化学反应溶液)也具有较好的输送性能。
With solid Polydimethylsiloxane(PDMS)as pump body material,we design the PZT actuator's support mode,dual-chamber tandem and PDMS double cavity pressure pump.Three kinds of fluid such as Distilled water,Na-Citrate liquor and chloroauric acid liquor are used to test the PDMS micro piezoelectric pump performance.The results show that the pump can transport not only low viscosity liquid like water but high viscosity fluid like some chemical reaction liquor as well.
出处
《长春工业大学学报》
CAS
2016年第2期105-109,共5页
Journal of Changchun University of Technology
基金
国家自然科学基金资助项目(51375207)
关键词
微流体反应器
PDMS
双腔串联
压电泵
microfluidic reactor
PDMS
dual-chamber tandem
piezoelectric micro-pump