摘要
巨磁阻效应微陀螺具有高灵敏、低噪声等优点.本文详细阐述了巨磁阻效应微陀螺的工作原理,设计了微陀螺结构,其驱动方向频率为5 553.7Hz,检测方向频率为5 556.7Hz,频率差仅为3Hz,实现了模态的良好匹配.设计了应用于该微陀螺中的检测磁场,测试了一款巨磁阻器件的灵敏度,基于上述结果完成了巨磁阻微陀螺的系统级仿真,并分析了巨磁阻微陀螺的噪声组成以及噪声的计算.仿真结果表明,将巨磁阻效应应用于陀螺的角速率信号检测中,可以实现灵敏度为46 mV·((°)/s)-1,噪声为7.826×10-3((°)/h)·(Hz)-1的信号检测.
MEMS gyroscope based on giant magnetoresistance（GMR）effect has the advantages of high sensitivity and low noise.In this paper,the working principle of the micro gyroscope with GMR effect is described in detail,and the micro gyroscope structure is designed.The frequency of driving direction is5 553.7Hz,and the frequency of detection direction is 5 556.7 Hz,so the frequency difference is only3 Hz,this design having good matching mode.The detection magnetic field applied in the micro gyro is designed and the sensitivity of GMR sensor has been tested.Based on the above results the system level simulation of the GMR micro gyroscope has been completed.Finally,the noise composition and noise calculation of the GMR gyroscope are analyzed.The simulation results show that the sensitivity of the GMR gyroscope can achieve 46 mV·（（°）/s）-1,the noise level of the GMR gyroscope can achieve7.826×10-3（（°）/h）·（Hz）^（-1）.
出处
《中北大学学报（自然科学版）》
CAS
北大核心
2016年第2期142-149,共8页
Journal of North University of China(Natural Science Edition)
关键词
巨磁阻
微机械陀螺
系统级仿真
噪声分析
giant magnetoresistance（GMR）
MEMS gyroscope
system level simulation
noise analysis
