摘要
采用磁控溅射法在碳化硅（SiC）颗粒表面成功制备了金属钼（Mo）涂层,分析了Mo涂层的成分和形貌;为改善初始涂层成分和形貌,对镀Mo改性SiC复合粉体进行了不同工艺的结晶化热处理,重点研究了热处理对SiC颗粒表面Mo涂层形貌和成分的影响。结果表明,磁控溅射法能够在SiC颗粒表面沉积Mo涂层,随磁控溅射时间的延长,SiC颗粒表面Mo涂层的粗糙度增大,但磁控溅射后SiC颗粒表面Mo涂层为非晶态。热处理能够有效改善SiC颗粒表面Mo涂层的成分、形貌及结晶状态,在600-1200℃之间结晶化热处理过程中,随热处理温度升高,SiC颗粒表面Mo涂层形貌主要经历了以下4个阶段变化：Mo涂层初步致密化—Mo的结晶致密化—Mo涂层的聚集长大—Mo与SiC之间化学反应;相应的Mo原子的存在状态也经历了如下变化：非晶态Mo原子—晶态Mo原子—Mo2C和MoSi2。其中800-900℃之间为最佳热处理温度,此时Mo涂层致密均匀包覆完整。SiC表面连续均匀致密的Mo涂层,有利于改善SiC颗粒增强金属基复合材料中基体与增强体之间的界面结合并控制不利界面反应,有利于复合材料综合性能的提高,必将扩大SiC颗粒作为增强体的应用范围。
The molybdenum coating was deposited on the surface of silicon carbide by a magnetron sputtering method, and its surface morphology and chemical composition were analyzed. In order to ameliorate the surface morphology and the state of the molybdenum coating, different kinds of crystallized heat-treatment were carried out. The evolution of the surface morphology and chemical composition of the molybdenum coating were investigated. The results show that the molybdenum coating can be deposited on the surface of silicon carbide by the magnetron sputtering method. With longer sputtering time, the roughness and the thickness of the coating are enhanced, and furthermore the molybdenum on the surface is in amorphous state. During the crystallized heat-treatment process, the morphology evolution of the molybdenum coating is as follows： the primary densification phase, the compact crystallization of molybdenum atoms, the dispersive accumulation of molybdenum coating, and the reaction between molybdenum and silicon carbide. In addition, the corresponding state evolution of molybdenum atoms is amorphous molybdenum, crystalline molybdenum, and molybdenum compound（Mo2C and MoSi2）. And the optimum heat treatment temperature range is about 800-900 ℃ It is believed that the uniform and compact Mo coating will broaden the application filed of SiC particles as the reinforcement in metal matrix composites, due to advantages of controlling the interfacial reaction and improving the interface bonding force in metal matrix composite.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2016年第4期1072-1077,共6页
Rare Metal Materials and Engineering
关键词
碳化硅
表面改性
磁控溅射
Mo涂层
热处理
silicon carbide
surface modification
magnetron sputtering
molybdenum coating
heat treatment
