3Gregory T A Kovacs. Micromachined Transducers: Sourcebook [M]. Boston: WCB, 1998. 被引量：1
4Minxin Zhou, Qingan Huang, Ming Qin. Modeling, design and fabrication of a triple-layered capacitive pressure sensor [J]. Sensors and Actuators A: Physical, 2005, 117(1): 71-81. 被引量：1
5E G Bakhoum, M H Cheng. Capacitive pressure sensor with very large dynamic range [J]. IEEE Transactions on Components and Packaging, 2010, 33: 79-83. 被引量：1
6Zhenhai Chen, R C Luo. Design and implementation of capacitive proximity sensor using microelectromechanical systems technology [J]. IEEE Transactions on Industrial Electronics, 2002, 45: 886-894. 被引量：1
7Yanfeng Jiang, Qingan Huang. A physical model for silicon anisotropic chemical etching [J]. Semiconductor Science and Technology, 2005, 20(6): 524-531. 被引量：1
8Nacer Eddine Demagh, Assia Guessoum, Hind Aissat. Chemical etching of concave cone fibre ends for core fibre alignment [J]. Meas Sci Technol, 2006, 17: 119-122. 被引量：1
