摘要
针对微型磁通门传感器降低功耗的要求,利用标准MEMS工艺制备了具有多孔结构铁芯的微型磁通门传感器。经过对器件的测试与分析,这一结构的铁芯能够降低器件功耗,提高传感器的整体性能。通过比较不同多孔铁芯对磁通门最佳激励电流的影响,综合考虑器件性能和制备工艺的要求,确定了最佳的设计参数。
To meet the low power consumption demand,the micro fluxgate based porous core was designed and fab-ricated by MEMS technology. Porous thin film core can be effectively used to decrease the power consumption andimprove the performance of sensor. By comparing the influence of the aperture ratio of porous core on the excitingcurrent,the optimal parameters are obtained. This parameter can meet the requirement of performance of sensor andmeanwhile the requirement of preparation process.
出处
《传感技术学报》
CAS
CSCD
北大核心
2016年第1期21-25,共5页
Chinese Journal of Sensors and Actuators
基金
高等学校博士学科点专项科研基金项目(20126102110031)
