摘要
利用钎焊工艺实现氧化铝敷铜陶瓷基板与铝箔的连接,成功制备出了具备良好导热性能的新型铝/氧化铝复合陶瓷基板。采用机械抛光、化学抛光和电解抛光等方式对铝表面层进行抛光处理。研究结果表明机械抛光、化学抛光和电解抛光等抛光方式均可有效提高铝层表面的光洁度和平整度。而复合抛光即先化学抛光再电解抛光的样品表面粗糙度最低、平整度最好,样品表面反光率在4种抛光方式中最高。
The bonding of aluminum film with coated copper alumina substrate is realized by brazing technology. The new type Al/Al2O3 composite ceramic substrate with high thermal conductivity is successfully prepared. Mechanical polishing, chemical polishing and electrolytic polishing methods are carried out for aluminum film polishing on the surface of composite substrate. Research results show that all of these polishing methods can improve the aluminum film surface roughness and enhance the reflective rate of aluminum film. Moreover, the sample processed by chemical and electrolytic polishing method has the lowest surface roughness and highest reflective rate compared with other polishing methods.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2016年第1期207-213,共7页
Acta Optica Sinica
基金
江苏高校优势学科建设工程
关键词
材料
钎焊
AL/AL2O3
复合基板
三维形貌
粗糙度
反光率
materials
soldering bonding
Al/Al2O3 composite substrate
three dimensional morphology
roughness
reflective rate
