摘要
为了满足光刻机工件台控制系统储存大量控制算法函数以及重要数据参数的要求,在分析了工件台控制系统主控模块的基础上,提出了一种以运动控制卡为主导的存储扩展方法 ,分别对FPGA和DSP进行了存储扩展设计,实现了工件台控制系统程序与数据的固化。最后,对FLASH的自启动进行了研究,介绍了一种通过自己编写的FLASH程序以及搬运程序实现DSP上电自启动的方法 ,成功验证了存储扩展设计的正确性,并在实际的工件台控制系统中得到了应用。
In order to meet the requirements of storing large amounts of control algorithm functions and other important data parameters in the control system of lithography wafer stage, based on the analysis of the control module of control system of lithography wafer stage, a storage extension method is proposed that is donated by motion controler and separately expand the storage of FPGA and DSP to achieve solidify program and data in the control system of wafer stagea. Finally, with the study of the self-starting of FLASH, a method to realize the self-starting of DSP is described when the power is on by using the own FLASH program and Carring program.What＇s more, the correctness of the design is successfully verified,and it has been applied in the actual control system of wafer stage.
出处
《自动化技术与应用》
2015年第12期20-25,共6页
Techniques of Automation and Applications
基金
国家极大规模集成电路制造装备与成套工艺的国家重大科技专项(编号2009ZX02207)
