摘要
本文设计了一维金属基压电扫描振镜并进行了性能测试.该振镜利用金属微铰链梁将压电振子的伸缩振动转化为硅反射镜的旋转振动,具有扫描角度大、可靠性高、成本低廉的特点.首先,建立了压电振镜的有限元模型,通过模态分析和谐振响应分析得到了振镜的谐振模态以及扫描角度极限随铰链梁尺寸和位置的变化关系.接着,制备了由压电振子、钢片基底和硅反射镜组成的振镜样机.最后,对振镜的幅频特性进行了性能测试.结果表明:2 mm×2 mm的反射镜在120V_(pp)的电压驱动下可在谐振频率5.34 k Hz处产生21°的扫描角度.随着驱动电压幅值的增加,一阶扭转谐振频率会略微下降.振镜样机Q值达144,扫描角度与驱动电压幅值呈线性关系.该振镜具有较大的镜面尺寸和扫描角度,制作工艺简单、抗冲击性能好,可满足流式细胞扫描成像高分辨率和模块化、批量化的应用需求.
A one-dimensional metal-based piezoelectric optical scanner was designed and tested. It uses micro metal hinges to transfer the stretching oscillations of the piezoelectric sheet into the resonant rotary vibration of the silicon mirror, and the scanner has merits of large scanning angles, high reliability and low cost. Firstly, the resonant modes were obtained and the influence of hinge dimensions and position on resonant frequencies and maximum scanning angles were investigated by structure modeling, modal and harmonic analysis with finite element simulation. Secondly, a scanner prototype was fabricated with piezoelectric sheet, metal substrate and silicon mirror. Finally, the scanning angles and frequency responses of the prototype were tested using angle measurement system. Experimental results show that with a 2 mm × 2 mm square mirror, a scanning angle of 21° can be achieved at resonant frequency of 5.34 kHz with driving voltages of 120Vpp. The first torsion resonant frequencies decline slightly as the driving voltage amplitude increases. The prototype presents Q value of 144 and the scanning angles change linearly with driving voltage amplitude. The scanner has a large mirror size and high scanning angle, which can meet the requirements of high resolution imaging and modular production of flow cytometer.
出处
《纳米技术与精密工程》
CAS
CSCD
北大核心
2016年第1期35-40,共6页
Nanotechnology and Precision Engineering
基金
国家高技术研究发展计划(863计划)资助项目(2011AA02A106)
苏州市应用基础研究计划资助项目(SYG201423)
关键词
压电扫描振镜
光学扫描
谐振
有限元模拟
piezoelectric optical scanner
optical scanning
resonant vibration
finite element simulation
