摘要
针对现有微纳米CMM机(Micro-Nano Coordinate Measuring Machine,微纳米CMM)测量逼近效率低的问题,设计了一种基于视觉引导的3D纳米测头。该测头以石英音叉结合一体式光纤微测杆测球作为微力触发定位传感器,以3个空间布置的微型USB高倍摄像机对工作台做视觉引导。将测球置于3个摄像机焦平面后约100μm处,通过高斯滤波、清晰度评价、极点搜索,对图像进行实时处理,判断试样是否接近测球,实现三维工作台的高低速引导控制。实验结果表明:该测头可以实现大行程、高精度微纳米CMM的自动高速逼近、低速触发定位测量,通用性好、集成度高,测量效率高。
In view of the low measuring approaching efficiency of existing micro /nano CMM, a 3D nano probe based on visual guiding was developed .A quartz tuning fork combined with the integrated fiber micro-stylus and micro-ball tip was used as the mi-cro-force sensor.Three mini USB high-definition cameras were used to guide the 3D worktable to approach the probe which was put behind the focal plane of the three cameras in a distance of 100μm.To determine whether the sample is close enough to the probe and realize the speed control of 3D worktable, the real-time image processing methods have been used , such as Gaussian filter, clarity evaluation , peak search etc .The experimental results show that this probe can achieve automatic high-speed approaching , low-speed triggering and positioning in long stroke with ultra precision .Good generality , high integration and high measuring effi-ciency are all advantages of this probe .
出处
《仪表技术与传感器》
CSCD
北大核心
2015年第11期11-14,共4页
Instrument Technique and Sensor
基金
国家自然科学基金项目(51175141)
关键词
微纳米三坐标测量机
微纳米测头
视觉引导
聚焦区域选择
清晰度评价
高斯滤波
极点搜索
micro/nano CMM
micro/nano probe
visual guiding
region of interesting selection
clarity evaluation
Gaussian filter
peak searching algorithm
