摘要
微波是整个电磁频谱非常重要的组成部分,可以与物质发生丰富的相互作用;而原子力显微术(Atomic Force Microscopy,AFM)有超高的空间分辨率,是纳米研究的核心工具。将微波技术与AFM结合将实现一种全新的扫描微波显微术(Scanning Microwave Microscopy,SMM)。该技术可以探测各种样品(包括导体、半导体、绝缘体及其它新型材料)在微纳米尺度的多种电学性质,如载流子类型、介电常数、电导率和导磁系数等;以及实现微纳米尺度下微波探测技术,如NMR、ESR等,具有非常广阔的应用前景。文中综述了SMM的基本原理,仪器组成,并介绍了其在电学性质探测、各种新型材料、生物等方面的前沿应用实例。最后,文章展望了扫描微波显微术的进一步技术发展和应用研究。
Microwave, which is a very important part of the electromagnetic spectrum, can interact with various materials of interest. Meanwhile, the atomic force microscopy （AFM）, which has a very high spatial resolution, is the core tool of nano research. The combination of microwave technology and AFM leads to a new technique--scanning microwave microscopy （SMM）, which has demonstrated a very broad range of applications. The SMM can detect many kinds of electrical properties, such as carrier type, dielectric constant, conductivity and permeability, etc., of various samples （including conductors, semiconductors, insulators and other functional materials） at the micro/nano scale; and it can be implemented for microwave detection technology, such as NMR and ESR etc., at the micro/nano scale. In this review article, we summarize the basic principles and instrumentation of SMM, and then review its widespread applications in electrical imaging of a number of novel materials and biological systems. Finally, we comment on the future prospects of the technology development and applications of SMM.
出处
《物理学进展》
CSCD
北大核心
2015年第6期241-256,共16页
Progress In Physics
基金
国家自然科学基金(批准号:21203038)
中国科学院"引进杰出技术人才"
"卓越青年科学家"及青年创新促进会
中国科学院科研装备研制项目(批准号:YZ201418)的经费资助
关键词
原子力显微术
扫描微波显微术
微波与物质相互作用
近场相互作用
Atomic Force Microscopy
Scanning Microwave Microscopy
Microwave-matter interactions
Near-field Interactions
