摘要
将碳纳米管(CNT)粉末以及氧化铜(CuO)粉末掺杂作为传感器的气敏材料,并通过旋涂的方式涂覆于敏感线圈。设计并简化了传感器的结构,通过丝网印刷工艺在基底上制备线圈。利用线圈的寄生电容与线圈电感形成LCR回路,分析了传感器LC无线耦合的原理以及混合气敏膜吸附丙酮气体的原理,将性质稳定的Al2O3陶瓷作为传感器的基底。在常温下对丙酮气体的体积分数进行检测,谐振频率的改变反映丙酮气体体积分数的变化。结果表明,所制得的传感器具有良好的响应和线性度及优良的稳定性,传感器的最低检测极限为5×10-5。
Carbon nanotubes(CNTs)and copper oxide(CuO)powders were doped as gas sensing materials for sensors and coated on the sensitive coils by the spin coating method.The structure of the sensor was designed and simplified,and the coil was prepared on the substrate by the screen printing process.The parasitic capacitance of the coil and the coil inductance were used to form the LCR circuit,the principle of LC wireless coupling of the sensor and the principle of adsorbing the acetone gas by the mixed gas sensitive film were analyzed.Al2 O3 ceramics with stable properties were used as the substrate of the sensor.The volume fraction of the acetone gas was measured at room temperature.And the change of the resonance frequency indicates the variation of the volume fraction of the acetone gas.The results show that the prepared sensor has good response and linearity and excellent stability.The minimum detection limit of the sensor is 5×10-5.
作者
周天浩
谭秋林
郭涛
郭倩倩
Zhou Tianhao;Tan Qiulin;Guo Tao;Guo Qianqian(Key Laboratory of Instrumentation Science&Dynamic Measuremant of the Ministry of Education,North University of China,Taiyuan030051,China;Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan030051,China)
出处
《微纳电子技术》
北大核心
2019年第4期285-289,共5页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61471324)
