摘要
采用高功率调制脉冲磁控溅射Al/（Al＋Ti）原子比（x）分别为0.25、0.5和0.67的TiAlSi合金靶,溅射功率1～4kW,氮气分压25%,工作气压0.3Pa,在Si（100）和AISI304奥氏体不锈钢基片上沉积了TiAlSiN纳米复合涂层。TiAlSiN涂层中氮含量保持在52.0at%～56.7at%之间,均形成了nc-TiAlN/a-Si3N4/AlN纳米晶/非晶复合结构。随着原子比x增加,非晶含量增加,涂层硬度先升高而后降低。当x=0.5时,硬度最高可达28.7GPa。溅射功率升高可提高溅射等离子体中金属离化程度,促进涂层调幅分解的进行,形成了界面清晰的非晶包裹纳米晶结构,且晶粒尺寸基本保持不变。当x=0.67时,溅射功率由1kW上升到4kW时,硬度由16.4GPa升至21.3GPa。不同靶材成分和溅射功率条件下沉积的TiAlSiN涂层的磨损率为（0.13～6.25）×10^-5mm^3/（N·m）,具有优良的耐磨性能。当x=0.67,溅射功率2kW时,nc-TiAlN/a-Si3N4纳米复合涂层具有最优的耐磨性能。
TiAlSiN nanocomposite coatings were deposited by modulated pulsed power magnetron sputtering （MPPMS） from TiAlSi targets with the Al/（AI＋Ti） atomic ratios （x） of 0.25, 0.5 and 0.67. The targets were powered by average sputtering power of 1-4 kW under work pressure of 0.3 Pa with a nitrogen addition of 25%. All of the TiAlSiN coatings with a nitrogen content of 52.0at%～56.7at% possessed an nc-TiAlN/a-Si3Na/AlN nanocomposite structure. As x increased, the percentage of amorphous phases was increased, meanwhile the hardness of the coatings firstly increased and then decreased. In the TiAlSiN coating with x =0.5, a highest hardness of 28.7 GPa was detected. Improvement in average sputtering power could prompt the formation of a complete phase separation nanocomposite coatings with a constant grain size. With x =0.67 under average sputtering power from 1 kW to 4 kW, the hardness of the coatings increased from 16.4 GPa to 21.3 GPa. A low wear rate of about （0.13-5.25） ×10^-5mm^3/（N·m） was detected in the TiAlSiN coatings with different Al contents as a function of the average sputtering power. An optimized wear resistance was identified in the TiAlSiN coatings deposited by MPPMS under average sputtering power of 2 kW at x =0.5.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2015年第12期1254-1260,共7页
Journal of Inorganic Materials
基金
国家自然科学基金(51102032)
国家自然科学基金创新群体(51321004)~~
