摘要
采用溶胶-凝胶旋涂法并结合在氢气中的还原工艺,在Si(001)基片上制备FeCo/SiO2复合薄膜,利用X线衍射和振动样品磁强计研究了还原温度对薄膜样品微观结构和磁性的影响。结果表明:当还原温度为700℃,薄膜中FeCo具有强的(110)择优取向,样品矫顽力较大;随着还原温度的升高,FeCo出现(200)择优取向生长,样品矫顽力逐渐降低;当还原温度为1000℃,FeCo具有较强的(200)择优取向,晶面间距膨胀引致的相对形变最小,样品矫顽力较小;当还原温度为1200℃,样品中出现晶态SiO2,FeCo具有强的(110)择优取向,不利于复合薄膜软磁性能提高。
FeCo/SiO2 thin films were prepared by sol-gel spin-coating method combined with hydrogen reduction process on Si （001） substrates. The effects of reducing temperature on the microstructure and magnetic properties of the samples were investigated by X-ray diffraction （XRD） and vibrating sample magnetometer （VSM）. The results show that FeCo presents magnificent （110） preferred orientation and the sample film has a high coercivity value when the reducing temperature is 700 ℃. With the increase of reducing temperature, FeCo （200） preferred orientation becomes dominant and coercivity value reduces gradually. A strong FeCo （200） preferred orientation growth is discovered for the sample films reduced at 1 000 ℃ with a lower coercivity and minimum relative lattice deformation. The soft magnetic properties of sample films trend to weaken when the reducing temperature is 1 200 ℃ due to the appearance of crystal Si02 phase with a dominant （110） preferred orientation.
出处
《兵器材料科学与工程》
CAS
CSCD
北大核心
2015年第5期23-26,共4页
Ordnance Material Science and Engineering
基金
吉林省青年基金科研项目(20090144)
