摘要
压力传感器的发展对测控工作起着重要的指引作用。常见压力传感器的测量温度都在200℃以下,无法精准测量高温下的压力。因此,国内外有很多学者致力于高温压力传感器的研究。主要探讨了高温压力传感器的发展现状、存在的问题及未来的发展趋势。
The development of pressure sensor plays an important role in the measurement and control. Common pressure sensor of the measurement temperature is below 200, can＇t accurately measure the pressure at high temperature. Therefore, there are many scholars at home and abroad are committed to the high temperature pressure sensor. This paper mainly discusses the development status, the existing problems and future development trend of high temperature pressure sensor.
出处
《科技与创新》
2015年第17期42-42,45,共2页
Science and Technology & Innovation
关键词
高温压力传感器
半导体材料
多晶硅
光纤技术
high temperature pressure sensor
semiconductor material
polysilicon
optical fiber technology
