摘要
采用螺旋打孔技术,在不同的激光进给速度下在TiC陶瓷上加工了微孔。用扫描电子显微镜分析了微孔形貌,利用能量色散谱仪研究了激光加工前后材料化学成分的变化,并结合X射线光电子能谱术(XPS)讨论了材料化学键的变化,探讨了利用飞秒激光加工TiC陶瓷过程中材料的去除机理。结果表明:所得到的微孔具有较好的形貌特征,孔边缘没有出现明显的微裂纹。微孔入口圆度达98%以上,入口直径略小于出口直径。激光进给速度对入口处孔边缘的微观形貌影响较大。进给速度较低时,激光切蚀区域出现平行的条纹状周期结构,随着进给速度的增加,表面以混沌的颗粒状结构为主。在较低或较高的进给速度下,重铸层都会出现更为剧烈的氧化现象,实验显示最佳的进给速率应在6.4μm/s左右。XPS分析显示材料的去除主要是通过多光子吸收,在加工过程中发生Ti-C键的断裂产生的Ti离子被氧化后会生成TiO2和Ti2O3。
By spiral drilling hole technology, micro-holes were drilled at different feeding speeds in TiC ceramic. The morphologic features of micro-holes were examined by scanning electron microscope, the elemental compositions for untreated specimens and laser-treated areas were identified by using an energy dispersive spectroscopy and the chemical bonds for untreated specimens and laser-treated debris were analyzed by an X-ray photoelectron spectroscopy. Then, the mechanism of interaction between femtosecond laser and TiC was further discussed. The results indicate that the drilled micro-holes show a good morphology without visible microcracks in ablated areas, The roundness of entrance is above 98∽, better than that of the exit. The diameter at entrance is slightly smaller than that of the diameter at exit. The feeding speed has an obvious effect on micro morphology of entrance. When the feeding speed is lower, the regular ripples are observed in ablated areas. With increasing feeding speed, the surface is characterized by sporadic particles. High oxygen content is detected in a deposited layer at low and high feeding speeds, respectively, and the optimum feeding speed is 6.4 μm/s in this research. Moreover, the machining mechanism could be explained by the multiphoton absorption theory. When the C-Ti bond is broken during machining, the titanium ion will combine with oxygen and the TiO2, Ti2O3 in debris will be generated.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2015年第6期1565-1571,共7页
Optics and Precision Engineering
基金
科技部国家重大科学仪器设备开发专项资助项目(No.2011YQ12007504)
国家自然科学基金资助项目(No.51472201)
关键词
飞秒激光
微孔加工
进给速度
微孔形貌
TiC陶瓷
femtosecond pulsed laser
micro-hole drilling
feeding speed
micro-hole morphology
TiCceramic
