摘要
通过将罗丹明6G掺入用光引发剂2-苄基-2-二甲基氨基-1-(4-吗啉苯基)丁酮和季戊四醇三丙烯酸酯混合而成的光刻胶中,基于飞秒激光双光子微加工技术制备出高为39μm,底面边长为20μm,周期为60μm的3×3正六棱锥微阵列。用波长为532 nm的半导体抽运激光照射样品,发现掺有罗丹明6G的微阵列样品与纯光刻胶制备的微阵列样品相比,在550 nm波长处多出一个明显的发射峰。与罗丹明6G的吸收光谱相比,可知该发射峰为微结构中掺入罗丹明6G而产生的发射峰。测试了该样品的衍射图案,由衍射光斑间距推算出来的周期与实际值相差2.3%。
Rhodamine 6G is doped into the photoresist which is made by mixing the 2-benzyl-2-（dimethylamino）- 4′-morpholino-butyroph and Pentaerythritol triacrylate. A 3×3 micro hexagonal pyramid array is fabricated based on the technology of femtosecond two photons by using the above photoresist. The height and length at the bottom of the hexagonal pyramid are 39 μm and 20 μm , respectively, the period of the micro hexagonal pyramid array is 60 μm. When the sample is irradiated by the 532 nm green laser, compared with the sample without Rhodamine 6G, an emission peak is found around the wavelength of 550 nm. When compared with the spectrum of the Rhodamine 6G, it is found that the peak is caused by the microstructure doped with the Rhodamine 6G. The diffraction of the sample is measured, the difference of the period between the prediction from the diffraction of the sample and designed value is 2.3%.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2015年第6期308-313,共6页
Acta Optica Sinica
基金
国家自然科学基金(61475079)
关键词
衍射
发射峰
飞秒激光双光子微加工
微三维阵列
diffraction
emission peak
femtosecond two photons micro-fabrication
micro three-dimension array
