摘要
针对蓝宝石生长过程中稳定性差、精确控制温度困难,导致晶体出现开裂和位错等质量下降的问题,采用常规PID和模糊控制结合的控制策略,实现对移相全桥电源的精确控制。利用Matlab进行仿真,控温精度可达2 000±0.2℃。实验表明,系统控制精度高,控制速度平稳,超调小。该控制方法可以满足蓝宝石晶体生长的要求。
Aiming at the poor stability of the sapphire growth process,the accurate temperature control is relatively difficult, which will lead to the decrease of the quality of the crystal, like fracture and dislocation etc. By using the combined control strategy of the conventional PID and fuzzy control,the accurate control of the phase shifting full bridge power is realized,and the Matlab simulation shows that the temperature controlling accuracy can be up to 2 000 ± 0.2 ℃ ,and that the system has high control accuracy,smooth control rate,and small overshoot. The control method can satisfy the requirement of the sapphire crystal growth.
出处
《江南大学学报（自然科学版）》
CAS
2015年第2期178-181,共4页
Joural of Jiangnan University (Natural Science Edition)
基金
教育部新世纪优秀人才计划项目(NCET-111-0659)
江苏省产学研前瞻性联合研究项目(BY2014023-11)
关键词
温度控制
移相全桥电源
模糊控制
控制精度
temperature control,phase-shift full bridge power supply,fuzzy control, control precision
